Properties of CrN/Mo₂N nano-multilayer films synthesized by multi-cathodic arc ion plating system

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• 作者：B. Han^a ; V.O. Pelenovich^a ; ^c ; M.I. Yousaf^a ; S.J. Yan^a ; W. Wang^a ; S.Y. Zhou^a ; B. Yang^b ; Z.W. Ai^a ; C.S. Liu^a ; D.J. Fu^a ; ^{djfu@whu.edu.cn}
• 关键词：Chromium nitride ; Molibdenum nitride ; Cathodic arc deposition ; Hardness ; Wear rate ; Multilayers ; Thin films
• 刊名：Thin Solid Films
• 出版年：2016
• 出版时间：30 November 2016
• 年：2016
• 卷：619
• 期：Complete
• 页码：160-165
• 全文大小：1760 K
• 卷排序：619

文摘

CrN/Mo2N multilayered hard coatings were synthesized by cathodic-arc ion plating. Influence of rotation speed on structure and mechanical properties is studied. Rutherford backscattering spectrometry is utilized to examine the multistructures. Enhanced residual stress (~− 4.6 GPa) and critical load (~ 70 N) are observed.