Synthesis and thermal stability of Pt3Si, Pt2Si, and PtSi films grown by e-beam co-evaporation
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文摘

Pure-phase films of PtSi, Pt2Si and Pt3Si were synthesized via e-beam co-evaporation.

Valence band XPS data support a recently proposed revision to metal-Si bonding model.

Fine-grained, columnar nanostructure hinders long-range mass transport and coarsening.

No agglomeration or loss of electrical conductivity after 48 h at 1000 °C in vacuum.

Co-evaporated PteSi films are more thermally stable than solid-state reacted films.

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