Pure-phase films of PtSi, Pt2Si and Pt3Si were synthesized via e-beam co-evaporation.
Valence band XPS data support a recently proposed revision to metal-Si bonding model.
Fine-grained, columnar nanostructure hinders long-range mass transport and coarsening.
No agglomeration or loss of electrical conductivity after 48 h at 1000 °C in vacuum.
Co-evaporated PteSi films are more thermally stable than solid-state reacted films.