Multi-frequency scanning interferometry using variable spatial spectral filter
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- 作者：Samuel Choi ; Ryoko Sato ; Heiichi Kato ; Osami Sasaki ; Takamasa Suzuki
- 关键词：Interferometry ; Spatial spectral filter ; Profilometry ; Fourier optics ; Optical metrology ; Surface profile measurement
- 刊名：Optics Communications
- 出版年：1 April, 2014
- 年：2014
- 卷：316
- 期：Complete
- 页码：168-173
- 全文大小：2393 K
文摘
Recently, a variety of the optical comb-based interferometries has been developed for profilometry and tomography. However the interference amplitude and phase characteristics involving the center frequency and mode spacing of the optical comb have not been sufficiently studied. To investigate these multi-frequency interference characteristics, we proposed a broadband frequency variable quasi-comb generator utilizing 4-f optical system and a spatial spectral filter which can perform unrestricted scanning of the center frequency and mode spacing. By using a sinusoidal phase modulating interferometer with the quasi-comb generator, fundamental proof-of-principle experiments were successfully demonstrated. The interference phase fixation during the symmetrical varying of the mode spacing produced the interference amplitude peak envelope without fringes. On the other hand, it was confirmed that the interference phase was changed linearly without the amplitude change by the center frequency shift of the multi-frequency spectrum.