X-ray photoelectron spectroscopy of Zn_0.98Cu_0.02O thin film grown on ZnO seed layer by RF sputtering

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• 作者：Ankush Vij ; Sanjeev Gautam ; Sung Ok Won ; Anup Thakur ; Ik-Jae Lee ; Keun Hwa Chae
• 关键词：Thin film ; X-ray photoelectron spectroscopy ; Oxygen vacancies
• 刊名：Materials Letters
• 出版年：2012
• 出版时间：1 December, 2012
• 年：2012
• 卷：88
• 期：Complete
• 页码：51-53
• 全文大小：543 K

文摘

We report the synthesis and electronic structure study of ZnCuO nanocrystalline thin film grown on ZnO seed layer by RF magnetron sputtering. X-ray diffraction (XRD) pattern reveals the single phase wurtzite structure preferentially grown along c-axis, while crystallite size using Debye Scherer¡¯s relation was calculated to be 10 nm. The scanning electron microscopy (SEM) depicts a columnar structure with a dense distribution of grains. X-ray photoelectron spectroscopy (XPS) of sputter-cleaned surface reveals a better stoichiometry and reduced oxygen vacancies in comparison to the as-deposited film. The Cu 2p core level spectrum ensures the Cu doping and suggests that Cu exists as Cu²⁺ and a mixture of Cu²⁺/Cu⁺ at the surface of as-deposited and sputter-cleaned film, respectively.