Fabrication of three-dimensional parylene HT diaphragms using D-RIE with a Si substrate

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• 作者：Satomitsu Imai ^{imai@eme.cst.nihon-u.ac.jp}Author Vitae
• 关键词：Parylene ; Diaphragm ; D-RIE ; Three-dimensional shape ; Fabrication characteristics ; MEMS
• 刊名：Sensors and Actuators A: Physical
• 出版年：2017
• 出版时间：1 January 2017
• 年：2017
• 卷：253
• 期：Complete
• 页码：146-155
• 全文大小：3860 K
• 卷排序：253

文摘

A method to fabricate a parylene HT diaphragm by using D-RIE was developed. This method can fabricate an arbitrary outline of a diaphragm easily. Diaphragms with concentric grooves up to 50 μm deep were successfully fabricated. The presented measures were effective to prevent thermal damage of the diaphragm.