Thermal conductivity of ZrO₂ thin films

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• 作者：Orain ; Sté ; phane ; Scudeller ; Yves ; Brousse ; Thierry
• 关键词：thin film ; thermal conductivity ; interface ; heat transport ; ZrO₂ film ; thermal resistance ; couche mince ; conductivité ; thermique ; interface ; transport de chaleur ; film de ZrO₂ ; ré ; sistance thermique
• 刊名：International Journal of Thermal Sciences
• 出版年：2000
• 出版时间：April, 2000
• 年：2000
• 卷：39
• 期：4
• 页码：537-543
• 全文大小：187 K

文摘

The thermal conductivity of thin solid films may be considerably lower than bulk material ones. We have recently developed a new photothermal method which enables the determination of the thermal conductivity of the dielectric films, on various kind of substrates, with an accuracy better than 10 % . In this paper, we present the thermal conductivity of two kinds of ZrO₂ thin films (stabilized with Y₂O₃ or not). We observe that a decrease in the dielectric thickness leads to a drastic drop of the thermal conductivity λ_a. The drop in the thermal conductivity has a similar shape for the two ZrO₂ phases. Phonons boundary scattering cannot contribute so significantly to the reduction of λ_a. The most satisfactory explanation is that the thermal conductivity λ_a is affected by an additional thermal resistance R, especially between ZrO₂ and alumina substrate. In the future, we intend to study in more detail the structures of the interfaces.