Plano-convex Variable Focal Length Micro-lens with a Polymer Nanocomposite Actuator
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- 作者：Boscij Pawlik ; Andreas Rieck ; Florenta Costache
- 关键词：Electrostrictive poylmer ; Nanoparticle polymer composite ; Variable micro-lens ; Chip fabrication
- 刊名：Procedia Engineering
- 出版年：2016
- 出版时间：2016
- 年：2016
- 卷：168
- 期：Complete
- 页码：1496-1499
- 全文大小：454 K
- 卷排序：168
文摘
An electromechanical actuator based on a P(VDF-TrFE-CFE) / BaTiO3 terpolymer nanocomposite of high field-induced strain was used in a variable focal length micro-lens design. The liquid-filled micro-lens consisted of a fluidic chamber, structured on a silicon wafer and sealed by an elastomeric lens membrane with a round-shaped nanocomposite actuator attached to it. A fabrication process was developed taking into account also particular characteristics of the actuator material for thin film parameter optimization. A change in the focal length of the fabricated micro-lens with a nanocomposite actuator was successfully demonstrated. Specifically, a 3 mm aperture, plano-convex variable focal length micro-lens of optical power ranging from 21 dpt to 13 dpt was obtained by varying the electric field applied on the nanocomposite actuator.