Nano-patterning of a TiO₂-organic hybrid material using interference of surface plasmon on aluminum

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• 作者：Hiroyo Segawa ; ^a ; ^{SEGAWA.Hiroyo@nims.go.jp"" rel=""nofollow} ; Satoru Inoue^a ; Minoru Osada^a ; Yoshihiko Takeda^a
• 关键词：Organic– ; inorganic hybrid materials ; Interference ; Surface plasmon ; Nano-patterning ; Ceramic
• 刊名：Journal of Photochemistry and Photobiology A: Chemistry
• 出版年：2011
• 出版时间：25 June 2011
• 年：2011
• 卷：221
• 期：2-3
• 页码：232-238
• 全文大小：2280 K

文摘

Nano patterns of a TiO₂-organic hybrid material have been fabricated by interference of surface plasmon on aluminum. The TiO₂-organic hybrid materials were prepared by the sol–gel method, and were irradiated through an aluminum mask by a UV light. After the unreacted parts were removed, patterns were obtained on the films. The patterns of lines approximately 300 nm in width and with a sub-100-nm height were obtained by controlling the UV irradiation time. It was confirmed that the patterns changed to anatase patterns by sintering at temperatures above 450 °C.