Masks and metallic electrodes compounds for silicon biosensor integration

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• 作者：Cristian Ravariu^a ; ^{cristian.ravariu@upb.ro} ; Elena Manea^b ; ^{elena.manea@imt.ro} ; Florin Babarada^c ; ^{florin.babarada@upb.ro}
• 关键词：Nanostructured materials ; Electrode materials ; Semiconductors ; Thin films ; Nanofabrications ; SEM imaging
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：15 March 2017
• 年：2017
• 卷：697
• 期：Complete
• 页码：72-79
• 全文大小：3109 K
• 卷排序：697

文摘

Bio-FET integrated systems - experimental technological tests. Nanostructured TiO2 synthesis from Ti by anodization. Engineering of surfaces in mixed manufacturing processes: biomaterials and microelectronics. Additive processing and joining technologies for BioFETs on Si-wafers, for Cr masks on optical glass. Materials characterization - results and validations.