A novel, highly sensitive and temperature insensitive tilt angle sensor based on an All-PCFI was proposed and demonstrated.
The All-PCFI was formed by a PCF with two collapse regions that were fabricated by fusion discharge technique.
In the measurement range of 0°–45°, the linear measurement sensitivity could be up to 55.67 pm/°.
In addition, the sensor could measure the tilt angle in all directions by demodulating signals of the four cantilever beams.