The crystallization and properties of sputter deposited lithium niobite
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- 作者：Joshua C. Shank ; M. Brooks Tellekamp ; W. Alan Doolittle ; alan.doolittle@ece.gatech.edu" class="auth_mail" title="E-mail the corresponding author
- 关键词：Lithium niobite ; Sputter deposition ; X-ray diffraction ; X-ray photoelectron spectroscopy
- 刊名：Thin Solid Films
- 出版年：2016
- 出版时间：30 June 2016
- 年：2016
- 卷：609
- 期：Complete
- 页码：6-11
- 全文大小：1646 K
文摘
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Room temperature sputter deposition of crystalline lithium niobite (LiNbO2)
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Contrast with previous high temperature corrosive growth methods
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Analysis of sputter deposition parameters on the chemical and physical properties of the deposited material