New composite functional material with shape memory effect (SME) has recently been proposed and tested for actuation on microscale. The composite nanotweezers have been designed and tested in manipulation of nano-objects. This report presents the new experiments on shape memory alloy鈥檚 (SMAs) properties on submicron scale of dimensions and the development of the technology of nanomanipulation on their bases. The minimal thickness of shape memory layer that undergoes SME was experimentally estimated for Ti2NiCu alloy. Impact of the focused ion beam modification of SMA superficial layer on the shape memory properties of micro-sized samples is discussed. Composite actuator of Ni-Mn-Ga magnetic SMA with the size of 20 脳 4 脳 2 渭m3 was fabricated for the first time and its thermal actuation was experimentally demonstrated ().