Effect of crystal structure on optical properties of sol-gel derived zirconia thin films

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• 作者：Xiaodong Wang ; ^{xiaodong_wang@tongji.edu.cn} ; Guangming Wu ; Bin Zhou ; Jun Shen ; ^{shenjun67@tongji.edu.cn}
• 关键词：Zirconia ; Sol&ndash ; gel processes ; Refractive index ; CFA ; RTA
• 刊名：Journal of Alloys and Compounds
• 出版年：2013
• 出版时间：15 April, 2013
• 年：2013
• 卷：556
• 期：Complete
• 页码：182-187
• 全文大小：1366 K

文摘

The optical properties of sol-gel derived zirconia thin films and their relation to the crystal structure are studied in this paper. ZrO₂ films were deposited on quartz glass and silicon wafer substrates by sol-gel method with conventional furnace annealing (CFA) and rapid thermal annealing (RTA). Crystal structures of the films were analyzed by X-ray diffraction (XRD) and Raman spectroscopy, while refractive indices of the films were determined from the reflectance and transmittance spectra. The refractive indices vary with the function of crystal structure and density of the films, which depends on annealing temperature and annealing technique. Lattice-mismatch between monoclinic phase and tetragonal phase was found to reduce the refractive index of ZrO₂ films.