Surface characterization of magnesium fluoride thin films prepared by a fluorine trapping based non-reactive sputtering technique
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- 作者：Rajnarayan Dea ; S. Maidul Haquea ; S. Tripathia ; shilpatripathi75@gmail.com" class="auth_mail" title="E-mail the corresponding author ; K. Divakar Raoa ; C. Prathapa ; Mohit Kumarb ; T. Somb ; N.K. Sahooc
- 关键词：MgF2 thin films ; RF magnetron sputtering ; Ellipsometry ; Atomic force microscopy ; Surface correlation functions ; Roughness evaluation
- 刊名：Vacuum
- 出版年：2016
- 出版时间：December 2016
- 年：2016
- 卷：134
- 期：Complete
- 页码：110-119
- 全文大小：2921 K
文摘
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MgF2 films were made by non-conventional RF sputtering based on fluorine trapping.
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A strong correlation is seen between the surface and optical quality of the films.
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Film growth rate influences the surface topography of the films.
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Sputtering power is optimized on the basis of optical and surface quality.