Effect of heat treatment on infrared reflection property of Al-doped ZnO films
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- 作者：Dagang Miao ; Shouxiang Jiang ; kinor.j@polyu.edu.hk" class="auth_mail ; Songmin Shang ; Zhuoming Chen
- 关键词：RF magnetron sputtering ; Thin films ; AZO ; Heat treatment ; Infrared reflection
- 刊名：Solar Energy Materials and Solar Cells
- 出版年：August 2014
- 年：2014
- 卷：127
- 期：Complete
- 页码：163-168
- 全文大小：2242 K
文摘
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Infrared reflection of AZO films was investigated from 1.5 渭m to 25 渭m.
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Infrared reflection of AZO films was closely related to annealing temperature.
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Infrared reflection was inversely proportional to film resistivity.
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AZO film with infrared reflection about 40% was prepared by annealing at 300 °C.