Deposition characteristics of titanium coating deposited on SiC fiber by cold-wall chemical vapor deposition
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- 作者：Xian Luo ; luo_shenfan@hotmail.com" class="auth_mail" title="E-mail the corresponding author ; Shuai Wu ; Yan-qing Yang ; Na Jin ; Shuai Liu ; Bin Huang
- 关键词：Metals ; Chemical vapor deposition (CVD) ; Coatings ; Microstructure ; Thermodynamic properties
- 刊名：Materials Chemistry & Physics
- 出版年：2016
- 出版时间：1 December 2016
- 年：2016
- 卷：184
- 期：Complete
- 页码：189-196
- 全文大小：1929 K
文摘
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Both thermodynamic analysis and experimental studies were adopted in this work.
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The transformation paths of TiCl4 to Ti is: TiCl4 → TiCl3 → Ti, or TiCl4 → TiCl3 → TiCl2 → Ti.
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Typical deposited Ti coating on SiC fiber contained two distinct layers.
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Deposition temperature is important on deposition rate and morphologies.
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Appropriate argon gas flow rate has a positive effect on smoothing of the coating.