Structural and optical properties of a-plane ZnO thin films synthesized on γ-LiAlO₂ (302) substrates by low pressure metal-organic chemical vapor deposition

详细信息    查看全文

• 作者：Hui Lin ; Shengming Zhou ; Jianhua Zhou ; Xuedong Liu ; Shulin Gu ; Shunming Zhu ; Zili Xie ; Ping Han ; Rong Zhang
• 关键词：a-plane ZnO thin films ; Structural and optical properties ; γ ; -LiAlO₂ (302) substrates ; Metal organic chemical vapor deposition ; X-ray diffraction ; Atomic force miscroscopy ; Raman spectroscopy
• 刊名：Thin Solid Films
• 出版年：2008
• 出版时间：31 July 2008
• 年：2008
• 卷：516
• 期：18
• 页码：6079-6082
• 全文大小：524 K

文摘

Nonpolar a-plane (112¯0) ZnO thin films have been fabricated on γ-LiAlO₂ (302) substrates via the low-pressure metal-organic chemical vapor deposition. An obvious intensity variation of the E₂ mode in the Raman spectra indicates that there exhibits in-plane optical anisotropy in the a-plane ZnO thin films. Highly-oriented uniform grains of rectangular shape can be seen from the atomic force microscopy images, which mean that the lateral growth rate of the thin films is also anisotropic. It is demonstrated experimentally that a buffer layer deposited at a low temperature (200 °C) can improve the structural and optical properties of the epilayer to a large extent.