Composition of nanocomposites based on thin layers of tin on porous silicon formed by magnetron sputtering

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• 作者：A.S. Lenshin^a ; ^{lenshinas@mail.ru" class="auth_mail" title="E-mail the corresponding author} ; V.M. Kashkarov^a ; E.P. Domashevskaya^a ; P.V. Seredin^a ; S.V. Ryabtsev^a ; A.N. Bel&rsquo ; tyukov^b ; F.Z. Gil&rsquo ; mutdinov^b
• 关键词：Porous silicon ; Thin films ; XPS ; Deposition
• 刊名：Physica B: Physics of Condensed Matter
• 出版年：2017
• 出版时间：1 January 2017
• 年：2017
• 卷：504
• 期：Complete
• 页码：1-8
• 全文大小：2403 K

文摘

Using scanning electron microscopy and X-ray photoelectron spectroscopy the features of morphology and peculiarities of the surface composition of nanocomposites made of thin tin layers by magnetron sputtering formed on porous silicon with pores size of 50–150 nm. Porous silicon was obtained on n-type conductivity crystalline silicon substrate. The obtained nanocomposites were found differ between themselves by the ratio of the main phases: tin dioxide, sub-oxide and metal tin in a dependence on the thickness of the deposited tin layer. Fraction of the oxidized tin in the phase composition of composites was reduced from the surface to the bulk of the sample. Moreover, it was determined that the deposition of tin nanolayers did not result in a considerable change of the phase composition of porous silicon substrate.