Flow rate independent sensing of thermal conductivity in a gas stream by a thermal MEMS-sensor - Simulation and experiments

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• 作者：Christoph J. Hepp^a ; ^b ; ^{christoph.hepp@ist-ag.com}Author Vitae ; Florian T. Krogmann^a ; ^{florian.krogmann@ist-ag.com}Author Vitae ; Gerald A. Urban^b ; ^c ; ^{urban@imtek.de}Author Vitae
• 关键词：Thermal system ; Constant power excitation ; Thermal conductivity ; Time independent excitation
• 刊名：Sensors and Actuators A: Physical
• 出版年：2017
• 出版时间：1 January 2017
• 年：2017
• 卷：253
• 期：Complete
• 页码：136-145
• 全文大小：2055 K
• 卷排序：253

文摘

We present a thermal system measuring thermal conductivity in a flowing fluid. Constant power mode is used to determine thermal conductivity. Due to the sensor design a temperature plateau is obtained, which is flow independent but gas sensitive. The distance between heater and temperature sensor is a design parameter to shift the temperature plateau. Experimental results confirm the simulation results.