Joule expansion imaging techniques on microlectronic devices

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• 作者：Sté ; phane Grauby ; Luis-David Patino Lopez ; Amine Salhi ; Etienne Puyoo ; Jean-Michel Rampnoux ; Wilfrid Claeys ; Stefan Dilhaire
• 关键词：Microelectronic devices ; Temperature variations ; Joule expansion ; Displacement
• 刊名：Microelectronics Journal
• 出版年：2009
• 出版时间：September 2009
• 年：2009
• 卷：40
• 期：9
• 页码：1367-1372
• 全文大小：376 K

文摘

We have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using scanning thermal microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements. The performances of the three methods are compared.