Full-three-dimensional (3D) pixel sensors, with electrodes penetrating through the entire silicon wafer, were fabricated at the Stanford Nanofabrication Facility, Stanford, California, USA. They have 71-μm-inter-electrode spacing, active edges and a compatible geometry to the ATLAS pixel detector readout electronics. Several samples were irradiated with neutrons to different doses up to an equivalent fluence of 8.6×10
15 n
1 MeVeq cm
−2. This corresponds to the integrated fluence expected after
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5 years at the Large Hadron Collider (LHC) with a luminosity of 10
35 cm
−2 s
−1 at 4 cm from the interaction point, where the ATLAS B-Layer is placed. Before and after irradiation, signals were generated by a 1060 nm infrared laser calibrated to in
ject a charge of 14 fC. This corresponds to
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3.5 minimum ionizing particles and should not perturb the charge status of the radiation-induced defects.