RF compensation of single Langmuir probe in low density helicon plasma
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文摘

Appropriate density and temperature measurement with Langmuir probe in RF Eenvironment.

Necessity of large auxiliary electrode for RF compensation at low densities (∼1016 m−3).

Measured two temperature electrons in low pressure helicon antenna produced RF plasma.

Tail electrons are localized only at off-axis in our cylindrical plasma system.

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