Hard and elastic epitaxial ZrB₂ thin films on Al₂O₃(0001) substrates deposited by magnetron sputtering from a ZrB₂ compound target

详细信息    查看全文

• 作者：Lina Tengdelius^a ; ^{lina.tengdelius@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Esteban Broitman^a ; ^{esteban.broitman@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Jun Lu^a ; ^{jun.lu@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Fredrik Eriksson^a ; ^{fredrik.eriksson@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Jens Birch^a ; ^{jens.birch@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Tomas Nyberg^b ; ^{tomas.nyberg@angstrom.uu.se" class="auth_mail" title="E-mail the corresponding author} ; Lars Hultman^a ; ^{lars.hultman@liu.se" class="auth_mail" title="E-mail the corresponding author} ; Hans Hö ; gberg^a ; ^{hans.hogberg@liu.se" class="auth_mail" title="E-mail the corresponding author}
• 关键词：Borides ; Epitaxial growth ; Mechanical properties ; Nanoindentation ; Sputter deposition
• 刊名：Acta Materialia
• 出版年：2016
• 出版时间：1 June 2016
• 年：2016
• 卷：111
• 期：Complete
• 页码：166-172
• 全文大小：1756 K

文摘

Zirconium diboride (ZrB₂) exhibits high hardness and high melting point, which is beneficial for applications in for e.g. metal cutting. However, there is limited data on the mechanical properties of ZrB₂ films and no data on epitaxial films. In this study, ZrB₂(0001) thin films, with thicknesses up to 1.2 μm, have been deposited on Al₂O₃(0001) substrates by direct current magnetron sputtering from a compound target. X-ray diffraction and transmission electron microscopy show that the films grow epitaxially with two domain types exhibiting different in-plane epitaxial relationships to the substrate. The out-of-plane epitaxial relationship was determined to ZrB₂(0001)‖Al₂O₃(0001) and the in-plane relationships of the two domains to ZrB₂[10$\overline{1}$0]‖Al₂O₃[10$\overline{1}$0] and ZrB₂[11$\overline{2}$0]‖Al₂O₃[10$\overline{1}$0]. Mechanical properties of the films, evaluated by nanoindentation, showed that all films exhibit hardness values above 45 GPa, a reduced Young's modulus in the range 350–400 GPa, and a high elastic recovery of 70% at an applied load of 9000 μN.