Thermally induced formation of metastable nanocomposites in amorphous Cr-Zr-O thin films deposited using reactive ion beam sputtering
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- 作者：David Rafajaa ; rafaja@ww.tu-freiberg.de" class="auth_mail" title="E-mail the corresponding author ; Christina Wü ; stefelda ; Gintautas Abrasonisb ; Stefan Braeuniga ; Carsten Baehtzb ; Florian Hanziga ; Milan Dopitaa ; 1 ; Matthias Krauseb ; Sibylle Gemmingb ; c
- 关键词：Metastable oxides ; In situ synchrotron diffraction ; Crystallization ; Reactive ion beam sputtering ; Rutherford backscattering spectrometry
- 刊名：Thin Solid Films
- 出版年：2016
- 出版时间：1 August 2016
- 年：2016
- 卷：612
- 期：Complete
- 页码：430-436
- 全文大小：1394 K
文摘
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Amorphous Cr-Zr-O thin films were deposited using reactive ion beam sputtering.
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After annealing in vacuum, metastable (Cr,Zr)2O3/(Zr,Cr)O2 nanocomposites form.
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The crystallization temperature depends strongly on the Zr concentration.
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Metastable hexagonal (Cr,Zr)2O3 accommodates up to 3.2 at.% of zirconium.
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Zirconium oxide crystallizes in tetragonal form, as it is stabilized by chromium.