Influence of substrate bias voltage on the properties of TiO₂ deposited by radio-frequency magnetron sputtering on 304L for biomaterials applications

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• 作者：L. Bait^a ; L. Azzouz^b ; N. Madaoui^a ; N. Saoula^a ; ^{nsaoula@cdta.dz}
• 关键词：Magnetron sputtering ; TiO2 ; Biomaterials ; 304L ; Bias voltage
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：395
• 期：Complete
• 页码：72-77
• 全文大小：1595 K
• 卷排序：395

文摘

TiO2 films were deposited on stainless steel 304L RF magnetron sputtering at different substrate bias. The hardness of TiO2 coated 304L are higher than those obtained for uncoated substrate. TiO2 films provide good protection for stainless steel against corrosion in Ringer solution.