Large-area thin-film capacitors deposited onto graphene bottom electrodes via facing-target sputtering that is free of plasma damage

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• 作者：Jae-Hee Kim¹ ; Byeong-Ju Park¹ ; Ji-Ho Eom ; Soon-Gil Yoon ; ^{sgyoon@cnu.ac.kr}
• 关键词：BMN thin film capacitor ; Graphene bottom electrode ; On-axis sputtering ; FTS ; Dielectric property ; Leakage current density
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：25 February 2017
• 年：2017
• 卷：695
• 期：Complete
• 页码：2886-2893
• 全文大小：2635 K
• 卷排序：695

文摘

Large-area thin film capacitors on graphene bottom electrode via Facing-Target Sputtering. Plasma damage free deposition of BMN dielectric thin films on graphene electrodes. Enhancement of electrical properties of BMN capacitors prepared on grapheme electrodes.