Fractal nature of non-spherical silica particles via facile synthesis for the abrasive particles in chemical mechanical polishing
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- 作者：Chenliang Lianga ; b ; Weili Liua ; rabbitlwl@126.com" class="auth_mail" title="E-mail the corresponding author ; Yonghui Zhenga ; b ; Xinglong Jia ; b ; Shasha Lia ; b ; Weijun Yina ; Xiaohui Guoa ; Zhitang Songa
- 关键词：Non-spherical ; Stober ; Fractal ; CMP
- 刊名：Colloids and Surfaces A: Physicochemical and Engineering Aspects
- 出版年：2016
- 出版时间：5 July 2016
- 年：2016
- 卷：500
- 期：Complete
- 页码：146-153
- 全文大小：2269 K
文摘
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Studied the effect of di-valent ions on the Stober system and obtained peanuts shaped non-spherical silica particles.
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Used electron scattering originally to study the fractal nature of amorphous silica particles. The results are the same as SAXS and Monte Carlo simulations.
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Applied this kind of non-spherical silica particles to CMP and got good results.