文摘
Complex shaped nc-Ni pillars with ~ 520 nm diameters were successfully fabricated. Hollow, C-, and x-shaped pillars with sidewalls as thin as ~ 109 nm were tested. Mechanical strengths of two grain size groups (9 nm and 14 nm) were characterized. Size-dependent softening observed in 9 nm grain size complex-shaped pillars. No softening observed in 14 nm grain size complex-shaped pillars.