Ultrasensitive multiple networked Ga₂O₃-core/ZnO-shell nanorod gas sensors

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• 作者：Changhyun Jin  ; [Author Vitae] ; Sunghoon Park  ; [Author Vitae] ; Hyunsu Kim  ; [Author Vitae] ; Chongmu Lee ; ^{cmlee@inha.ac.kr}  ; [Author Vitae]
• 关键词：Ga2O3 ; ZnO ; Nanorods ; Sensor ; Response ; NO2
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2012
• 出版时间：3 January 2012
• 年：2012
• 卷：161
• 期：1
• 页码：223-228
• 全文大小：1046 K

文摘

Ga₂O₃-based gas sensors show very poor performance at room temperature despite being able to detect a range of gases efficiently at high temperatures of 600-1000 ¡ãC, which limits their practical use. This study examined the effect of the encapsulation of Ga₂O₃ nanorods with ZnO on the NO₂ gas sensing properties. Ga₂O₃-core/ZnO-shell nanorods were fabricated by a two step process comprising the thermal evaporation of GaN powders and atomic layer deposition of ZnO. Multiple networked Ga₂O₃-core/ZnO-shell nanorod sensors showed the response of 32,778 % at an NO₂ concentration of 100 ppm at 300 ¡ãC. This response value is 692 times larger than that of bare-Ga₂O₃ nanorod sensors at an NO₂ concentration of 100 ppm. The substantial improvement in the response of Ga₂O₃ nanorods to NO₂ gas by the encapsulation by ZnO can be accounted for based on the space-charge model.