Experimental approach to estimate diffusivity of metal organics in supercritical CO₂ at high temperatures

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• 作者：Yu Zhao ; ^{zhao@dpe.mm.t.u-tokyo.ac.jp} ; Yusuke Shimoyama ; Takeshi Momose ; Yukihiro Shimogaki
• 关键词：Supercritical CO2 ; Diffusivity ; Metal organics ; TiO2
• 刊名：The Journal of Supercritical Fluids
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：120
• 期：part_P2
• 页码：209-217
• 全文大小：2041 K
• 卷排序：120

文摘

A new method to experimentally estimate diffusivity of reactive metal organics is proposed. Planar and trench substrate are used to extract diffusivity. Diffusivity of Ti precursor in supercritical CO2 at >250 °C is estimated. Modified Chapman-Enskog equation is used for correlation.