In-situ observations of stress-induced thin film failures

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• 作者：Z.B. Zhao ; J. Hershberger ; J.C. Bilello
• 关键词：Thin films ; Anisotropic stress ; Stress development ; Film failure ; White beam topography
• 刊名：Thin Solid Films
• 出版年：2010
• 出版时间：1 February 2010
• 年：2010
• 卷：518
• 期：8
• 页码：2037-2044
• 全文大小：615 K

文摘

In this work, the failure modes of thin films under thermo-mechanical treatments were observed via in-situ white beam X-ray topography. The in-situ experiments were carried out using an experimental setup on Beamline 2-2 at the Stanford Synchrotron Radiation Laboratory. Magnetron sputtered polycrystalline thin films of Ta and CrN on Si substrates were selected for the present study due to their disparate states of intrinsic residual stresses: the Ta film was anisotropically compressive and the CrN film was isotropically tensile. Under a similar heating–cooling cycle in air, the two types of films exhibited distinct failure modes, which were observed in-situ and in a quasi-real-time fashion. The failures of the samples have been interpreted based on their distinctive growth stress states, superimposed on the additional stress development associated with different forms of thermal instabilities upon heating. These included the formation of oxide for the Ta/Si sample, which led to an increase in compressive stress, and a phase change for the CrN/Si sample, which caused the isotropic stress in the film to become increasingly tensile.