Composition, surface morphology, optical properties and Ti profile characteristics of Ti-diffused LiTaO3 strip waveguide
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文摘
Ti-diffused LiTaO3 strip optical waveguide was fabricated and fully characterized. Waveguide surface caves in 70 nm below crystal surface due to lattice contraction. Waveguide is single-mode, polarization-insensitive and has a loss <0.4 dB/cm. Ti profile follows a sum of two error functions in the width direction of waveguide. Ti profile follows a Gaussian function in the depth direction of waveguide.

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