Diffusion growth of Ga3+-doped LiTaO3 thin film were studied thermodynamically.
Diffusion constant is 1.41 · 10−6 m2/s and activation energy is 237.2 kJ/mol.
Solubility constant is 22.9 · 1026 ions/m3 and enthalpy of solution is 28.9 kJ/mol.
Ga3+ dopant has small effect on LiTaO3 refractive index.
Ga3+ growth can be described by a Fick-type equation with a constant diffusivity.