Shear-horizontal surface acoustic wave characteristics of a (110) ZnO/SiO₂/Si multilayer structure

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• 作者：Jingting Luo^a ; Aojie Quan^a ; Chen Fu^b ; ^{Chen.Fu@newcastle.ac.uk} ; Honglang Li^c ; ^{lhl@mail.ioa.ac.cn}
• 关键词：Shear-wave ; Liquid sensing application ; TCF ; (110) ZnO films
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：5 February 2017
• 年：2017
• 卷：693
• 期：Complete
• 页码：558-564
• 全文大小：1274 K
• 卷排序：693

文摘

SH-SAW was successfully exited on IDT/(110)ZnO/SiO2/Si multilayer structure. A laser vibrometer was used to confirm no out-off plane vibration of the SH-SAW. SiO2 films compensate the negative TCF of (110) ZnO and also enhance the K2. The performance of SH-SAW device was optimized by adjusting each layer thickness.