Development and characterization of miniaturized LTCC pH sensors with RuO₂ based sensing electrodes

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• 作者：Libu ManjakkalAuthor Vitae ; Beata SynkiewiczAuthor Vitae ; Krzysztof ZaraskaAuthor Vitae ; Katarina CvejinAuthor Vitae ; Jan Kulawik ; ^{jkulawik@ite.waw.pl" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Dorota SzwagierczakAuthor Vitae
• 关键词：pH sensor ; LTCC ; Thick film ; Potentiometry ; Impedance spectroscopy ; Wireless application
• 刊名：Sensors & Actuators: B. Chemical
• 出版年：2016
• 出版时间：February 2016
• 年：2016
• 卷：223
• 期：Complete
• 页码：641-649
• 全文大小：1960 K

文摘

This work describes the development of a low cost miniaturized solid state pH sensor using LTCC (low temperature cofired ceramic) technology. Thick film sensing electrodes screen printed on LTCC substrates were made of RuO₂ and RuO₂-Ta₂O₅-glass based pastes. The Ag/AgCl/KCl reference electrode for the potentiometric sensor was deposited by screen printing on the same LTCC substrate. The sensing performance and mechanism were investigated by using the potentiometric method and electrochemical impedance spectroscopy (EIS). The fabricated potentiometric sensors show close to the Nernstian behavior with the sensitivity being 56 mV/pH for RuO₂ layer and 58 mV/pH for RuO₂-Ta₂O₅-glass layer in a wide pH range (2–11). The sensors exhibit very fast response and excellent stability. A wireless system for online solution monitoring operating together with the fabricated sensor was successfully tested. Good performance of the prepared LTCC sensors suggests their applicability in the next generation of solid state pH sensors destined for online solution monitoring.