Thermal and surface effects on the pull-in characteristics of circular nanoplate NEMS actuator based on nonlocal elasticity theory

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• 作者：W.D. Yang ; W.B. Kang ; X. Wang ; ^{xwang@sjtu.edu.cn}
• 关键词：Thermal loading ; Surface effect ; Pull-in voltage ; Circular nanoplate ; Casimir force ; Nonlocal elasticity
• 刊名：Applied Mathematical Modelling
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：43
• 期：Complete
• 页码：321-336
• 全文大小：1666 K
• 卷排序：43

文摘

The pull-in voltages decrease with the increase of nonlocal parameters of circular nanoplate. The thermally corrected Casimir force decreases the pull-in voltages compared to that of classical Casimir force. The influence of environment temperature change on the pull-in voltage is larger than that on the pull-in displacement.