Precise nitrogen depth profiling by high-resolution RBS in combination with angle-resolved XPS

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• 作者：Kenji Kimura ; Kaoru Nakajima ; Thierry Conard ; Wilfried V ; ervorst ; Andreas Bergmaier ; Gü ; nther Dollinger
• 关键词：High-resolution RBS ; Angle-resolved XPS ; Nitrogen depth profiling ; Combination analysis
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2010
• 出版时间：June 2010
• 年：2010
• 卷：268
• 期：11-12
• 页码：1960-1963
• 全文大小：410 K

文摘

Nitrogen depth profiling in a high-k gate stack structure, SiON/HfO₂/SiON/Si(0 0 1) was performed by high-resolution Rutherford backscattering spectroscopy (HRBS) in combination with angle-resolved X-ray photoelectron spectroscopy (AR-XPS). The nitrogen depth profile is determined so that both the HRBS spectrum and the angular dependence of the XPS yield are reproduced. The obtained nitrogen profile is compared with the result of high-resolution elastic recoil detection (ERD) which is the most reliable technique for depth profiling of light elements. The agreement between the result of the present combination analysis and that of high-resolution ERD is fairly good, showing that the present combination analysis is a promising method for the analysis of light elements.