Atmospheric-pressure plasma-enhanced chemical vapor deposition of microporous silica membranes for gas separation

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• 作者：Hiroki Nagasawa ; Yuta Yamamoto ; Nobukazu Tsuda ; Masakoto Kanezashi ; Tomohisa Yoshioka ; Toshinori Tsuru ; ^{tsuru@hiroshima-u.ac.jp}
• 关键词：Atmospheric-pressure plasma ; Plasma-enhanced chemical vapor deposition ; Microporous silica membrane ; Gas separation
• 刊名：Journal of Membrane Science
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：524
• 期：Complete
• 页码：644-651
• 全文大小：1544 K
• 卷排序：524

文摘

Atmospheric-pressure plasma-deposition can produce highly permselective silica membranes. The membranes grown with N2/Ar plasma displays a molecular sieving property. The permeance ratios for He/N2 and He/SF6 are 196 and 820, respectively. The thermally-annealed membrane exhibits remarkable permselectivity for CO2. The permeance ratios for CO2/N2 and CO2/CH4 are 46 and 166, respectively.