A numerical study of ultraprecision machining of monocrystalline silicon with laser nano-structured diamond tools by atomistic simulation
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- 作者：Houfu Daia ; b ; Genyu Chena ; b ; hdgychen@163.com" class="auth_mail" title="E-mail the corresponding author ; Cong Zhoua ; b ; Qihong Fanga ; Xinjiang Feia ; b
- 关键词：Molecular dynamics ; Phase transformation ; Laser nano-structured diamond tool ; Subsurface damage ; Ultraprecision machining
- 刊名：Applied Surface Science
- 出版年：2017
- 出版时间：30 January 2017
- 年：2017
- 卷：393
- 期：Complete
- 页码：405-416
- 全文大小：6271 K
文摘
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A laser nano-structured diamond tool in machining brittle material silicon causes a smaller hydrostatic stress, a less compressive normal stress, a lower temperature and a smaller cutting force.
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The laser nano-structured diamond tool machining generates smaller chip volume and more beta-silicon phase.
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The tool with V-shape groove can reduce the resistance to cutting during nanoscale machining process.
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The potential energy of subsurface atoms for pyramid-structured tool is much lower than that of using non-structured tool and other structured tools.
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The number of other atoms for pyramid-structured tool is much smaller than that of using non-structured tool and other structured tools.