Atom probe tomography (APT) combined with in-situ TEM probing technique was performed to understand the threshold switching in amorphous NbO2.
We proved that the local crystallization is attributed to this threshold switching.
The local crystallization of amorphous NbO2 through an applied voltage bias was proved by comparing the ToF spectra of a-NbO2 and c-NbO2 obtained using APT.
Time shift of a-NbO2 could be explained by the voltage drop due to the high resistivity of a-NbO2.
The electrical, compositional, and structural information could be directly combined by applying a bias through the AP tip.