Atomic force microscopy study of TiO₂ sol–gel films thermally treated under NH₃ atmosphere

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• 作者：C. Trapalis ; N. Todorova ; M. Anastasescu ; C. Anastasescu ; M. Stoica ; M. Gartner ; M. Zaharescu ; T. Stoica
• 关键词：AFM ; Grain analysis ; TiO₂ thin films ; Sol– ; gel method
• 刊名：Thin Solid Films
• 出版年：2009
• 出版时间：1 October 2009
• 年：2009
• 卷：517
• 期：23
• 页码：6243-6247
• 全文大小：455 K

文摘

Multilayered TiO₂ films were obtained by sol–gel and dipping deposition on quartz substrate followed by thermal treatment under NH₃ atmosphere. In an attempt to understand the close relationship between microstructural characteristics and the synthesis parameters, a systematic research of the structure and the morphology of NH₃ modified TiO₂ sol–gel films by XRD and Atomic Force Microscopy is reported. The surface morphology has been evaluated in terms of grains size, fractal dimension and surface roughness. For each surface, it was found a self-similar behavior (with mean fractal dimension in the range of 2.67–3.00) related to an optimum morphology favorable to maintain a nano-size distribution of the grains. The root mean square (RMS) roughness of the samples was found to be in the range of 0.72–6.02 nm.