An efficient and rapid method was developed for the synthesis of 1-aryl-2-(trimethylsilyl)acetylene. Copper and palladium-catalyzed sonogashira-type coupling of trimethylsilylacetylene and aryl bromides or iodides in the presence of triethylamine as base under microwave irradiation in acetonitrile afforded the desired 1-aryl-2-(trimethylsilyl)acetylene. The use of microwave was found to significantly improve the reaction yield and shorten the reaction time.