Effects of annealing on wettability and physical properties of SnO thin films deposited at low RF power densities

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• 作者：Su-Shia Lin ; ^{sushia@ncnu.edu.tw} ; Sheng-You Fan ; Yung-Shiang Tsai
• 关键词：Film ; Power density ; Sputtering ; Annealing
• 刊名：Ceramics International
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：43
• 期：2
• 页码：1802-1808
• 全文大小：1292 K
• 卷排序：43

文摘

The SnO thin films were deposited at low RF power densities by RF magnetron sputtering. According to XRD and XPS analyses, the SnO thin film comprised nanocrystalline orthorhombic SnO with a (110) orientation. Reducing RF power density resulted in better nanocrystallinity, changing hydrophobicity to hydrophilicity, and increasing the optical transmission in the UV–vis–NIR region. After annealing, the SnO thin film favored p-type conductivity and hydrophilicity. As the annealing temperature increased, the coexistence of nanocrystalline orthorhombic SnO and tetragonal SnO2 in the film clearly increased the optical transmission in the ultraviolet region. The SnO thin films after annealing at 500 ℃ in vacuum and N2 (200 sccm) exhibited a higher hole mobility and a better optical selection in the ultraviolet region, respectively.