Ultrasonic standing waves-driven high resolution rotary table
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文摘

Cylinder shape piezoelectric element generates motion of a rotor.

Angular position of table is detected by integrated optical encoder.

Maximal displacements of contact zone elements almost coincide at nearly 125 kHz.

Motion trajectory of contact zone elements is defined by elliptical curve.

Rotary table angular resolution equals approximately 8 μrad in both directions.

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