Ion and extreme ultraviolet emission features of CO₂ laser produced Sn and SnO₂ plasmas

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• 作者：Hui Lan^a ; Haidong Lei^a ; Duluo Zuo^b ; Xinbing Wang^b ; ^{xbwang@hust.edu.cn} ; Guang Zheng^a ; ^{mzheng88@foxmail.com}
• 关键词：Laser-produced plasma ; CO2 laser ; Ion emission ; Extreme ultraviolet (EUV) emission
• 刊名：Vacuum
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：135
• 期：Complete
• 页码：86-92
• 全文大小：1497 K
• 卷排序：135

文摘

Comparison of plasma characteristics from CO2 laser-ablation ceramic SnO2 and metal Sn targets. It was shown that the ion features of SnO2 plasma were higher than those of Sn plasma. The EUV emission feature of Sn plasma is higher than that of SnO2 plasma. The intensity of EUV emission decrease with the increasing of the angle off laser axis.