Sputtering of dimers off a silicon surface
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- 作者：Maureen L. Nietiadi ; Yudi Ros ; i ; Michael Kopnarski ; Herbert M. Urbassek
- 关键词：Molecular dynamics ; Sputtering ; Silicon
- 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- 出版年：2012
- 出版时间：15 October, 2012
- 年：2012
- 卷：289
- 期：Complete
- 页码：97-99
- 全文大小：296 K
文摘
We present experimental and molecular-dynamics simulation results of the sputtering of a Si surface by 2 keV Ar ions. Results on both the monomer and dimer distributions are presented. In simulation, these distributions follow a generalized Thompson law with power exponent and , respectively. The experimental data, obtained via plasma post-ionization in an SNMS (secondary neutral mass spectrometry) apparatus, show good agreement with respect to the dimer fraction, and the relative energy distributions of dimers and monomers. The consequences for the dimer sputtering mechanism are discussed.