A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes
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- 作者：Houman Zahedmanesh ; houman.zahedmanesh@imec.be" class="auth_mail" title="E-mail the corresponding author ; Kris Vanstreels ; Mario Gonzalez
- 关键词：Finite element model (FEM) ; Cohesive zone model (CZM) ; Thin film ; Fracture ; Nano-indentation ; Cube corner probe
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：20 April 2016
- 年：2016
- 卷：156
- 期：Complete
- 页码：108-115
- 全文大小：1389 K
文摘
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Radial crack initiation and propagation in brittle films during cube corner indentation is modelled.
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The elastic and cohesive damage parameters of low-k films (OSG 2.4) were identified.
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A parametric study was conducted on the impact of elastic and cohesive properties of thin films.