Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique
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- 作者：Viktoras Grigaliūnasa ; Viktoras.Grigaliunas@ktu.lt" class="auth_mail" title="E-mail the corresponding author ; Algirdas Lazauskasa ; Dalius Juciusa ; Darius Viržonisb ; Brigita Abakevičienėa ; Saulius Smetonac ; Sigitas Tamulevičiusa
- 关键词：Microlens ; E-beam lithography ; 3D patterning ; Thermal reflow
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：164
- 期：Complete
- 页码：23-29
- 全文大小：1535 K
文摘
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Microlens pixel height array was designed assigning gray scale level to each pixel.
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Microlens arrays were fabricated by 3D EBL followed by thermal reflow process.
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The shape and RMS surface roughness of microlens vary with e-beam exposure dose.