A model- and simulation-based approach for tolerancing and verifying the functional capability of micro/nano-structured workpieces
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文摘

Modelling the function of microstructured workpieces is base for defining the optimal topography.

Simulating functional behaviour gives geometrical parameters and tolerances for manufacturing.

Measurement of manufactured part delivers parameter values of real geometry.

Parameters of real geometry are used as input in functional model.

Simulation delivers the result: degree of capability for requested function.

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